功率超声换能器夹持电容的在线检测的研究  

On-line detection of power ultrasonic transducer clamping capacitance

作　　者：朱武[1] 赵空勤[1] 金长善[1] 蔡鹤皋[1] 

机构地区：[1]哈尔滨工业大学机电学院,黑龙江哈尔滨150001

出　　处：《哈尔滨工业大学学报》2001年第2期203-205,共3页Journal of Harbin Institute of Technology

摘　　要：为了解决大功率超声应用的换能器电端匹配问题，分析了超声波换能器在谐振频率三次谐波下的阻抗特性，给出了超声换能器三次谐波下的阻抗电路模型．并根据阻抗电路模型建立了对超声换能器的夹持电容实现在线检测简单、可靠性高的方法，实验证明该方法有效的．该方法可以在换能器工作过程中随时检测夹持电容的变化，根据检测结果对匹配电感进行动态调整，实现真正意义上的换能器电端的动态匹配，从而大大改善匹配质量，提高系统的工作性能．The simple but highly reliable on-line detection of ultrasonic transducer clamping capacitance based on the impedance circuit model was described. The impedance characteristics of the ultrasonic trannsducer under triple harmonics were studied. The experimental results show that this method can be used to detect the variation of clamping capacitance while the transducer is operating. The matching inductance can be dynamically regulated according to the results of detection, so that the overall performance of the whole system is improved.

关 键 词：夹持电容 三次谐波 阻抗 等效电路 在线检测 功率超声换能器 电端匹配 

分 类 号：TB552[理学—物理]