锥形轮廓亚波长二维表面浮雕结构的矢量衍射特性  

VECTOR DIFFRACTED CHARACTERISTIC OF TAPERED PROFILE TWO-DIMENSIONAL SUBWAVELENGTH SURFACE-RELIEF STRUCTURE

作　　者：鱼卫星[1] 卢振武[1] 王鹏[1] 翁志成[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,130022

出　　处：《光子学报》2001年第3期331-335,共5页Acta Photonica Sinica

基　　金：国防预研基金资助项目

摘　　要：本文利用严格耦合波理论对多台阶逼近锥形轮廓的亚波长二维表面浮雕结构进行了计算分析 .从本文的计算结果来看 ,采用多台阶来逐步逼近锥形轮廓的亚波长零级二维表面浮雕结构具有在宽波段、大视角上能够实现抗反射 ,并且对光波的偏振态下不敏感的特性 .从而使得该结构为薄膜光学在材料的选择方面提供了极大的选择自由度 .Tapered profile two dimensional subwavelength surface relief structure was analysised by using of rigorous couple wave method.It was stated by resultant that multilevel subwavelength two dimensional surface relief structure have characteristics,which can realize antireflection in broadband and great view angle,which also has a thick skin for polarization of wave.Thus,a great choice is presented in selecting materials for thim film optics.

关 键 词：抗反射 二维表面浮雕结构 严格耦合波 多台阶逼近 锥形轮廓 矢量衍射特性 亚波长结构 

分 类 号：O436.1[机械工程—光学工程] O484.41[理学—光学]