铜铌溅射型低β超导腔的研制及初步实验  

Researches and Preliminary Experiments on Copper-Niobium Sputtered Low-β Superconducting Resonator

作　　者：郝建奎[1] 赵夔[1] 张保澄[1] 谢大林[1] 王莉芳[1] 全胜文[1] 沈子林[1] 唐渝兴[1] 张云驰[1] 杨希[1] 胡岩乐[1] 赵坤[1] 

机构地区：[1]北京大学重离子物理教育部重点实验室,北京100871

出　　处：《高能物理与核物理》2001年第6期582-587,共6页High Energy Physics and Nuclear Physics

基　　金：国家自然科学基金!资助 ( 1 96850 0 1 )&&

摘　　要：超导谐振腔是超导加速器的关键部件 .用于重离子超导加速器的低β加速腔的最佳选择是四分之一波长谐振腔 (QWR) .目前 ,利用无氧铜为基底 ,溅射一层几微米厚的铌膜 ,可以获得极好的超导性能和加速离子性能 .但是 ,四分之一波长谐振腔的内表面复杂 ,溅射均匀的铌膜比较困难 .针对此难题 ,发展了一种多参数可调节的溅射方法 ,在 64 0×2 2 0的大型腔体内 ,成功地生成了一层均匀的、超导性能优异的铌膜 .超导腔的低温实验表明铌膜的性能良好 .Superconducting resonator is the important component of a superconducting accelerator. The best choice of the acceleration cavity for heavy ion superconducting accelerator is quarter wave resonator (QWR). By sputtering a layer of niobium films of several microns on the OFHC copper substrate, good superconducting properties and acceleration properties of the cavity can be obtained. However, it is very difficult to get uniform niobium films by sputtering because the inner surface of the QWR is complicated. To deal with this problem, we developed a multiparameter adjusting method to control the sputtering process of different parts of the QWR. A layer of uniform niobium film with nice superconducting performance is obtained. The low temperature experiments with liquid helium show that the Cu Nb QWR has good superconducting characters. The Q value of the cavity is about 5×10 8.

关 键 词：薄膜 铜铌溅射 QWR 低温实验 超导加速腔 四分之一波长谐振腔 变参数直流偏压溅射 

分 类 号：TL503[核科学技术—核技术及应用] O511.9[理学—低温物理]