静电激振法测量微机械材料的杨氏模量  

The Measurement of Young's Modulus for Micro-machined Materials

作　　者：顾利忠[1] 苏菲[1] 赵颉[1] 张以恒[1] 

机构地区：[1]清华大学自动化系,北京100084

出　　处：《材料科学与工程》2001年第2期9-11,共3页Materials Science and Engineering

基　　金：国家自然科学基金资助项目 !(69885 0 0 5 )

摘　　要：利用蚀刻硅技术制造的微机械构件 ,由于特殊的制作工艺而需要对其材料的机械性能如杨氏模量等进行测试。这是随微机械技术的产生而提出的一个新课题。文章综述了微机械材料杨氏模量的静态测试法。提出了微机械材料杨氏模量的动态测试法———静电激振法。这种方法具有测试装置简单、测量容易。It is necessary to measure the mechanical properties such as Yong's modulus of micro\|machined materials because of the special manufacturing process by using silicon etching technique. This is a new theme proposed with the appearance of micro\|machined parts. In this paper the static methods for Young's modulus measurement of micro\|machined materials are summarized, After that, electrostatically\|excited method for Young's modulus measurement of micro\|machined materials is proposed. This method has some features such as simplifying the test devices, easy operation and widely being used in practice.

关 键 词：微机械材料 杨氏模量 静电激励 测量 硅材料 蚀刻 

分 类 号：TH140.7[一般工业技术—材料科学与工程] TN305.7[机械工程—机械制造及自动化]