分离靶多弧离子Nb-Al/Mo-Al合金薄膜及其腐蚀行为研究  

Study on the Corrosion Behavior of Nb-Al/Mo-Al Films Prepared By Multi Ion Plating with Separate Targets

作　　者：张扬伟[1] 王富岗[1] 李德俊[1] 王秀兰 林国强[2] 

机构地区：[1]大连理工大学材料工程系,辽宁大连116024 [2]大连理工大学三束改性国家重点实验室,辽宁大连116024

出　　处：《真空》2001年第1期23-27,共5页Vacuum

摘　　要：本文采用分离靶多弧离子镀技术 ,通过改变基片负偏压和分离靶弧电流等参数 ,在 310 SS(stainlesssteel)基片上制备了多种成分的 Nb1 - x Alx(0 .38<x<0 .6 4) / Mo1 - y Aly(0 .6 <y<0 .78)合金薄膜。结果表明 ,选择适当的基片负偏压和分离靶弧电流可制得所需成分的二元合金薄膜。对所制备的 Nb1 - x Alx 薄膜做了6 0 0℃、90 0℃的热腐蚀实验 ,结果表明 ,该薄膜具有较好的抗热腐蚀能力 ,对部分 Nb1 - x Alx/ Mo1 - y Aly 薄膜样品做了 6 0 0℃下 2 .3% SO2 / S2 / 8.8% N2 环境中 (气氛总压为 1atm)的高温气体腐蚀实验 ,结果表明 :310 SS多弧离子镀 Al、Mo- Al薄膜提高了样品的抗高温气体腐蚀能力 ;而多弧离子镀 Mo、Nb、Nb- Al样品抗高温气体腐蚀能力下降 ,其中镀 Mo样品最差。In this paper, the method of Multi arc ion plating with separate targets was used to depositNb 1-x Al x(0.38<x< 0.64 )/Mo 1-y Al y(0.6<y<0.78)films on the 319ss(stainless steel) by changing negative bias voltage of substrate, current of separate targets. The experimental results showed that it is available to deposit the binary alloy films by selecting suitable negative bias voltage of substrate and current of separate targets. In addition, the hot corrosion behaveor of Nb Al films with coating Na 2SO 4 at 600℃ and 900℃ has been investigated, respectively. The results indicated that the performance of Nb Al films is better than its substance 310SS in hot corrosion. The corrosion behavior of 310SS with coating Mo Al/Nb Al films has been studied in gas mixture of 2.3%SO 2/S 28.8%N 2 at 600℃,results showed that corrosion resistance of sample with coating Al and Mo Al film is better than base material, however, corrosion resistance of sample with coating Mo/Nb/Nb Al film is worse than base material.

关 键 词：310不锈钢 多弧离子镀 分离靶 抗高温气体腐蚀能力 铌铝合金膜 钼铝合金膜 表面处理 

分 类 号：TG174.444[金属学及工艺—金属表面处理]