ZnO/TiO_2多层薄膜氨气敏光学特性研究  

Study on ammonia-sensitive optical property of ZnO/TiO_2 multi-layer thin film

作　　者：陈凯[1] 吴文鹏[1] 郑顺镟[1] 

机构地区：[1]中山大学物理系,广州510275

出　　处：《激光技术》2001年第3期209-213,共5页Laser Technology

摘　　要：介绍用S G法制备了ZnO/TiO2 多层薄膜的方法 ,研究了在几种还原性气体中的气敏透射光谱 ,发现其对氨气具有优良的选择性 ,且其光学透过率在一定浓度范围内随氨蒸气浓度增加而显著地单调上升 ,敏感波段扩展到整个可见光区域。这是一种有实用价值的气敏光纤传感材料。In the paper, the preparation of ZnO/TiO2 multi-layer film with S-G method is introduced and the gas sensitive optical property of the film is studied. The film is very sensitive to ammonia. It's light transmittance increases considerably and monotonously as the gas concentration increases. The sensitive wavelength band extends to full visible spectrum. This material is of great practical value for gas sensing fiber. The gas sensitive mechanism and high selectivity mechanism are also discussed.

关 键 词：S-G法 多层薄薄 气敏光纤传感材料 气敏光学特性 传感器 氧化锌 二氧化钛 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] O484.4[自动化与计算机技术—控制科学与工程]