相位偏移干涉测量波面的一种新算法  

A New Algorithm of Phase-stepping Interferometry for Measuring Surface

作　　者：朱振宇[1] 严家骅[1] 李百源[1] 

机构地区：[1]北京长城计量测试技术研究所,北京100095

出　　处：《仪器仪表学报》2001年第3期282-286,291,共6页Chinese Journal of Scientific Instrument

摘　　要：本文分析了利用相位偏移干涉的相位计算方法对测量结果准确程度的影响 ,提出了一种利用相位偏移干涉原理测量波面的新算法 (四幅改进算法 )。考虑到移相误差是导致相位偏移干涉测量法产生误差的主要因素 ,本文着重讨论相位偏移干涉测量算法对移相误差的敏感程度。根据对实验测试机构所进行的测量与分析 ,以实际的数据为基础得出在相位偏移干涉测量中新算法的优秀品质。该新算法对移相误差有良好的抑制作用 。This paper analyses the effects of the phase stepping interfe rometry algorithm about the measurable accuracy, and introduces a new algorithm of phase stepping interferometry (the improved four frames aigorithm) Because the phase stepping error is the major factor which causes the error of the phase stepping interferometry algorithm, this paper emphatically discusses the sensitivity of the phase stepping interferometry algorithm existing the phase stepping error On the basis of the measurement and analysis about experiment device, the results which can show the good characters of the new algorithm about the phase stepping interfe rometry have been achieved This new algorithm can control the error of phase stepping and get better result of the measurement in both theoretic calculation and practical measurement

关 键 词：相位偏移干涉技术 平面测量 移相误差 四幅改进算法 

分 类 号：TH744.3[机械工程—光学工程] O436.1[机械工程—仪器科学与技术]