丝织构对薄膜X射线残余应力分析的影响  

The Effect of Fiber Texture on the Stress Analysis of Thin Films by X-ray Diffraction

作　　者：张铭[1] 何家文[1] 

机构地区：[1]西安交通大学金属材料强度国家重点实验室,陕西西安710049

出　　处：《机械工程材料》2001年第5期21-23,31,共4页Materials For Mechanical Engineering

基　　金：国家自然科学基金资助项目! (5 97310 2 0 )

摘　　要：具有择尤取向的薄膜材料因弹性呈现各向异性 ,在利用X射线衍射法测定薄膜残余应力时 ,常发生d sin2 ψ测试曲线的非线性振荡 ,无法得到准确的应力值。本文利用Voigt、Reuss和Kroner模型计算了TiN薄膜的弹性常数随 ψ角的分布在低 ψ角区发生的弯曲。与实测PVDTiN薄膜的应力测试曲线的弯曲情况相似 ,说明丝织构的确可能造成薄膜应力测试d sin2 ψ曲线的低The preferred orientation of thin films led to oscillation of the measured d sin 2ψ curve when the residual stresses of films were measured using X ray diffraction. The distribution of elastic constants of TiN film vs. ψ angle was calculated using Voigt, Reuss and Kroner models. The result shows that the distribution of the elastic constants of TiN film shows curved in the range of the small ψ angle which is similitude to that of the measured d sin 2 ψcurve. It illuminates that the fiber texture can certainly make the d sin 2ψ curve not show linear.

关 键 词：丝织构 弹性常数 残余应力 薄膜 X射线衍射 

分 类 号：O484.5[理学—固体物理] O348.6[理学—物理]