纹膜结构微麦克风的动态特性:使用EDA/CAD工具进行Top-down设计  

Dynamic Behaviour of Miniature Microphone with Corrugated Membrane: Top down Design with EDA/CAD

作　　者：陈兢[1] 刘理天[1] 李志坚[1] 

机构地区：[1]清华大学微电子学研究所,北京100084

出　　处：《Journal of Semiconductors》2001年第7期951-956,共6页半导体学报（英文版）

摘　　要：综合使用通用电路模拟软件 PSPICE和有限元分析软件 A NSYS对一种硅基微麦克风进行了系统模拟 .得到了各项参数的优化值 ,优化后的微麦克风在音频范围内具有平直的响应 .在此基础上 ,提出了一种 Top- down的优化设计方式以准确预测系统的行为 。The optimization of a fabricated miniature microphone is presented by collecting the electrical network simulator PSPICE and the FEA(Finite Element Analysis)program ANSYS.After the simulation of the dynamic behaviour of miniature microphone with corrugated membrane by using EDA/CAD tools,optimal values of the related parameters are obtained.The optimized miniature microphone shows a flat frequency response in the audio frequency.The top down approach is also introduced to analyse the behaviour of the complex system and the interactions between different components in the design process.

关 键 词：CAD EDA 动态特性 微麦克风 纹膜结构 TOP-DOWN设计 

分 类 号：TP391.7[自动化与计算机技术—计算机应用技术]