薄膜滤光片的光学稳定性研究  

OPTICAL STABILITY OF THIN FILM FILTERS

作　　者：白胜元[1] 顾培夫[1] 刘旭[1] 唐晋发[1] 

机构地区：[1]浙江大学现代光学仪器国家重点实验室,浙江大学光电系310027

出　　处：《光子学报》2001年第5期576-580,共5页Acta Photonica Sinica

摘　　要：薄膜滤光片中心波长的稳定性是非常重要的参量 .这不仅取决于膜层的聚集密度 ,而且与薄膜材料和基板的折射率温度系数及线性膨胀系数有着紧密的关系 .本文根据滤光片的实验参量 ,分析计算了它们对滤光片中心波长漂移影响的大小 。The stability of central wavelength of a thin film filter is a very important parameter.The optical stability of a narrow band filter strongly depends not only on the packing density of individual thin film layer but also on the temperature coefficient of refractive index and thermal expansion of the film materials and substrate.Based on the experimental results for TiO 2/SiO 2 band pass filters,the effects on central wavelength shift of filters are analyzed and calculated and the methods for stability improvement are presented.

关 键 词：光学薄膜 带通滤光片 光学稳定性 波长 薄膜滤光片 漂移 聚集密度 折射率温度系数 线性膨胀系数 

分 类 号：O484.41[理学—固体物理]