软X射线多层膜光栅的衍射特性  

Diffraction Properties of Multilayer-Gratings in Soft X- Ray Region

作　　者：崔宏滨[1] 刘文汉[1] 

机构地区：[1]中国科学技术大学结构分析开放实验室物理系,合肥230026

出　　处：《光学学报》2001年第8期1004-1007,共4页Acta Optica Sinica

基　　金：国家自然科学基金 (195 740 44 )资助课题 ;中日科技合作项目j982 1

摘　　要：用X射线运动学理论对软X射线多层膜光栅的衍射特性进行了研究。发现其衍射规律与多层膜的布拉格衍射和普通光栅衍射有本质的区别 ,可将衍射能量集中于某一衍射级上 。The main diffraction properties of a soft X-ray optical component-multilayer-gratings are deduced and discussed in detail on the basis of X-ray kinematics. Results show that the main energy of diffraction light can be concentrated in one order and the resolving power and reflection of multilayer-grating are higher. There is an essential difference between the dispersive properties of multilayer-gratings and multilayers.

关 键 词：多层膜 多层膜光栅 软X射线 衍射特性 

分 类 号：O484.43[理学—固体物理] O436.1[理学—物理]