利用激光引发的热透镜效应无损检测固体薄片中的深度缺陷  

NONDESTRUCTIVE DETECTION OF DEEP DEFECTS IN SOLID SHEET USING THERMAL LENS EFFECT INDUCED BY LASER BEAM

作　　者：施柏煊[1] 谈恒英[1] 缪进[1] 

机构地区：[1]现代光学仪器国家重点实验室,浙江大学杭州310027

出　　处：《光子学报》2001年第2期174-178,共5页Acta Photonica Sinica

基　　金：国家自然科学基金资助项目! (697780 1 8)

摘　　要：本文介绍利用激光引发固体薄片表面的热透镜效应无损检测固体薄片深层缺陷的理论分析和反射偏转法 .面扫描信号通过计算机处理 ,以三维象或灰度象显示出深层缺陷 ,实验结果表明 :缺陷的检测深度随泵浦光调制频率的增加而减少 ,利用相位信号 ,检测的深度比利用幅值信号的更深 。Theory analysis and reflective deflection method of nondestructive detection deep defects in solid sheet materials using thermal lens effect induced by laser beam on surface of the solid are described.Three dimension image and grey image of defects which abtained by processing of two dimension scanning signals using computer are displayed.It is shown that the deep detecting defects is decreasing with increasing of modulation frequency of pump beam and detecting deepness is deeper by phase signals as compared with by amplitude signals,Which is coincident with prediction by theory analysis.

关 键 词：热透镜效应 无损检测 激光引发 固体薄片 深度缺陷 泵浦光 理论分析 反射偏转法 

分 类 号：TB303[一般工业技术—材料科学与工程] TN249[电子电信—物理电子学]