相移测量技术中相移器研究  

STUDY ON PHASE SHIFTER EMPLOYED IN PHASE SHIFTING METROLOGY

作　　者：范华[1] 张弛[1] 任雅萍[1] 谭玉山[1] 

机构地区：[1]西安交通大学激光红外研究所

出　　处：《应用光学》1998年第6期34-37,33,共5页Journal of Applied Optics

摘　　要：本文介绍一种用于相移测量技术的相移器。该相移器由计算机通过Ｄ／Ａ接口板自动控制输出电压幅度，其电路采用闭环控制，位移由压电晶体产生，具有很高的电压稳定度（０１％）和较小的相移误差（小于３°）。描述相移器的结构。A phase shifter used in phase shifting interference metrology tchnique is presented in this paper.Its output voltage is controlled automatically by computer through D/A interface card.The closed loop control system is used in the circuit.The PZT is employed to generate displacement.The error of output voltage is less than 0 1% and the error of phase shift less than 3 degrees.The structure of phase shifter,the operating principle of the driver and the calibration method are described.

关 键 词：电子散斑 相移器 干涉计量 相移测量 计算机控制 

分 类 号：TM930.9[电气工程—电力电子与电力传动] TN623[电子电信—电路与系统]