微石英音叉陀螺激励与检测电极的研究  

A Study on the Driving and Detecting-Electrodes in a Micro Quartz Tuning Fork Gyroscope

作　　者：王莹[1] 孙雨南[1] 秦秉坤[1] 印平[2] 

机构地区：[1]北京理工大学光电工程系,北京100081 [2]北京联合大学专业基础部,北京100101

出　　处：《北京理工大学学报》2001年第4期503-507,共5页Transactions of Beijing Institute of Technology

基　　金：部级基金资助项目 ( J9.1 .6)

摘　　要：根据弹性力学和静电场理论建立压电梁弯曲振动时晶体内电场分布的泊松方程 ,研究微石英音叉陀螺不同形式的激励与检测电极的性能 .对泊松方程求解 ,得出了几种典型电极形式下压电梁内电场的分布表达式 ,计算驱动电极的等效体力和检测电极的压电电流 .根据等效体力和压电电流的大小确定出了最佳驱动电极和检测电极的形式 ,给出了微石英音叉陀螺电极性能的研究方法 .The paper investigates the properties of driving and detecting electrodes in a micro quartz tuning fork gyroscope. Based on theories in elastic mechanics and electrostatics, the Possion equation that describes the distribution of electric field in the piezoelectric beam is derived, and then solved, while the expression for electric field distribution concerning several typical electrode configurations is achieved. The equivalent volume force for the driving electrode and the piezoelectric current for the detecting electrode are then calculated. The optimum driving and detecting electrode configurations are chosen based on the values of the equivalent volume force and piezoelectric current. Method for the study of properties of electrodes in micro quartz tuning fork gyroscopes is proposed.

关 键 词：石英陀螺 压电效应 等效体力 压电电流 检测电极 微机械角速度传感器 

分 类 号：TP212.12[自动化与计算机技术—检测技术与自动化装置] TH824.3[自动化与计算机技术—控制科学与工程]