双通道压电式密度传感器的研究  

Study on double-channel piezoelectric sensor for liquid density determination

作　　者：李文鹏 赵新生[2] 张鹏[2] 申大忠[2] 

机构地区：[1]山东省计量科学研究所,山东济南250014 [2]山东大学化学与化工学院,山东济南250100

出　　处：《传感器技术》2001年第8期4-6,共3页Journal of Transducer Technology

基　　金：山东省自然科学基金项目 (Q99B0 1)

摘　　要：在同一压电石英晶片上制备两个石英晶体谐振器 ,实验结果表明双通道之间的相互干扰可以忽略。在石英晶体表面修饰多孔TiO2 膜层 ,可大大提高传感器对液体密度的灵敏度。采用两个修饰不同厚度TiO2 膜层的双通道压电传感器的频率差作为测量信号 ,可以消除液体粘度的影响 ,并获得与液体密度有良好线性关系的工作曲线 。Double channel quartz crystal resonators were prepared on a single piezoelectric quartz crystal disc.It was shown that the interfere between the two channels is negligible.After modifying with a thin mesoporous TiO 2 film, the sensitivity of the piezoelectric resonator to liquid density is significantly improved.By using the frequency difference of two resonators modified with TiO 2 film of different thickness,influence of the liquid viscosity was corrected.The frequency difference between the two channels is in a good linearity with the densities of liquids.The double channel piezoelectric sensors can be used to the determination of densities of liquids.

关 键 词：密度 液体 压电 传感器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]