用相移干涉法测量表面三维轮廓的研究  

3D surface profile measurement based on the phase-shift interfering technology

作　　者：许万里[1] 郑伟[1] 苑惠娟[1] 

机构地区：[1]哈尔滨理工大学机械动力学院,黑龙江哈尔滨150080

出　　处：《传感器技术》2001年第8期19-21,24,共4页Journal of Transducer Technology

摘　　要：简要地介绍了以白光干涉理论为基础 ,利用相移干涉法进行表面三维轮廓测量的原理与系统的构成 。The principle of measurement and instrument of a kind of profiler is briefly described based on the white light interfering method and adopting the phase shift interfering technology.It emphatically discusses the method and technique for measuring 3D surface profile with computer sampling and processing data with high speed.

关 键 词：白光 相移干涉法 表面三维轮廓 光学测量 

分 类 号：TH741[机械工程—光学工程]