双面接触式电容压力传感器的设计及制造工艺流程  

The Design and Fabrication Process of Double Sided Touch Mode Capacitive Pressure Sensor

作　　者：许高攀[1] 陈广文[1] 胡国清[1] 李志博[1] 

机构地区：[1]厦门大学机电工程系,福建省厦门市361005

出　　处：《仪表技术与传感器》2001年第9期33-35,共3页Instrument Technique and Sensor

摘　　要：双面接触式电容压力传感器除了具有单面接触式电容压力传感器的优点 ,还有它的特别之处 :双面接触式电容压力传感器被施加同样的压力时 ,可以得到比单面接触式电容压力传感器增大一倍的电容量和灵敏度 ,而且不会因此增加多少成本 ;工作时可靠性更高 ,即使一面失灵还有另一面可以正常工作。文中就双面接触式电容压力传感器的工艺进行了初步设计。Double sided touch mode capacitive pressure sensor offer better performance in industrial application. Not only does it have the advantage of the single sided touch mode capacitive pressure sensor, but also have higher sensitive and more dependable. With this kind of fabrication process, it will not increase the fabrication cost , but will get one more time capacitive quantity and sensitivity than single sided one. The characteristics and fabrication process of the double sided touch mode capacitive pressure sensor was discussed in detail.

关 键 词：双面接触式电容压力传感器 工艺流程 自停止腐蚀 设计 制造 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]