氮气/氨气的高压快脉冲放电光谱研究  

Spectroscopic Study on the High Voltage Fast Pulsed Discharge of Nitrogen,Ammonia or Their Mixture

作　　者：刘征平[1] 王培南[1] 杨炜东[1] 郑家骠[1] 李富铭[1] 

机构地区：[1]复旦大学物理系三束材料改性国家重点实验室,上海200443

出　　处：《光谱学与光谱分析》2001年第5期637-640,共4页Spectroscopy and Spectral Analysis

基　　金：国家自然科学基金资助项目 (批准号 699780 0 5) ;上海应用物理中心资助项目 (批准号98JO1 4 0 1 1 )

摘　　要：本文测量了氮气、氨气及其混合气体的快脉冲放电等离子体的光谱 ,用光谱分析方法研究了等离子体成分及其与气压和配比的关系 ,并讨论了在制备氮化物时使用氮、氨混合气体的有利之处。The emission spectra from the pulsed discharge plasma of nitrogen, ammonia or their mixture were measured. In the discharge of pure nitrogen gas, as the pressure increased, the discharge volume decreased and more dissociation of nitrogen molecules occurred due to the higher energy density. In the discharge of ammonia, N, N+ and NH+ were observed, but no NH2 and NH3 were detected, indicating that ammonia, which has the lower dissociation and ionization energies as compared to nitrogen, was highly dissociated. The discharge of the mixture of N-2 and NH3 was also studied. The dependence of the dissociation of nitrogen on the ratio of nitrogen to ammonia was investigated by emission spectra. The optimal ratio for nitrogen dissociation was obtained. The advantage of using the mixture of nitrogen and ammonia in the synthesis of nitrides was discussed.

关 键 词：快脉冲放电 光谱 氮气 氨气 等离子体 氮化物 制备 合成 混合气体 

分 类 号：TQ126.2[化学工程—无机化工] O539[理学—等离子体物理]