用瞬态激振法测量微机械材料的弹性模量  

Measurement of Young's modulus for micro-machined materials using transient exitation

作　　者：顾利忠[1] 苏菲[1] 赵颉[1] 张以恒[1] 

机构地区：[1]清华大学自动化系,北京100084

出　　处：《清华大学学报（自然科学版）》2001年第9期126-128,共3页Journal of Tsinghua University(Science and Technology)

基　　金：国家自然科学基金资助项目 ( 6 9885 0 0 5 )

摘　　要：利用蚀刻硅技术制造的微机械构件 ,由于其特殊的制作过程需要对其材料的机械性能如弹性模量等进行测试。文章综述了已有的微机械材料弹性模量测试方法。在此基础上 ,提出了用瞬态激振法来测量微机械材料的弹性模量的方法 ,这种方法把微机械构件做成悬臂梁 ,通过对悬臂梁进行瞬态碰击激励并使之产生一个短暂的振荡。然后求得振荡趋于稳定时的频率 ,这就是悬臂梁的固有谐振频率。再通过计算公式求出微机械材料的弹性模量。这种方法具有测试装置简单、测量容易、精度高等特点。The mechanical properties of micro machined materials including the Young's modulus and hardness need to be measured after special manufacturing processes. This paper summarizes the published methods for measuring Young's modulus for micro machined materials. A transiently excited method is then proposed to measure Young's modulus for micro machined materials. In this method, the measured micro machined part is a cantilever made using silicon etching. This cantilever can be vibrated for a short time when transient excitation is applied. The stable vibrating frequency of the cantilever can be used to calculate the Young's modulus of the material. This method simplifies test device, is easy to do and is accurate.

关 键 词：瞬态激振 微机械材料 悬臂梁 弹性模量 

分 类 号：TH145[一般工业技术—材料科学与工程]