真空阴极电弧沉积(Ti,Al)N薄膜的应用研究  

Research on (Ti,Al)N coatings Deposited by Vacuum Cathodic Arc Deposition

作　　者：付志强[1] 蔡育平[1] 袁镇海[1] 林松盛[1] 

机构地区：[1]广州有色金属研究院,广东广州510651

出　　处：《机械工程材料》2001年第8期25-26,42,共3页Materials For Mechanical Engineering

摘　　要：为了提高TiN涂层刀具的耐磨性 ,采用钛铝合金靶 ,以真空阴极电弧沉积法制备了(Ti,Al)N涂层。对膜层形貌成分、组织结构及硬度进行了测试及研究 ,并试验了 (Ti,Al)N涂层高速钢钻头及YG6硬质合金刀具的使用寿命。结果表明 :(Ti ,Al)N涂层硬度高达HV0 .1,15370 0 ,(Ti,Al)N涂层使高速钢钻头及YG6硬质合金刀具的使用寿命显著提高。For improving the wear resistance of TiN coated tools, (Ti,Al)N coating were fabricated.The (Ti,Al)N coatings were deposited by means of (VCAD) and using the target of Ti Al alloy. The composition,structure, and hardness of the coatings were studied.The serve lives of (Ti,Al)N coated high speed steel drills and YG6 cemented carbide cutting tools were also tested.The results showed that the hardness of (Ti,Al)N coatings reached HV 0.1,15 3700, the serve lives of (Ti,Al)N coated high speed steel drills and YG6 cemented carbides cutting tools could increase remarkably.

关 键 词：真空阴极电弧沉积 涂层刀具 氮化铝 氮化钛 

分 类 号：TG711[金属学及工艺—刀具与模具] TG174.444