低能量X-RAY测厚仪与β-RAY测厚仪在薄膜生产中的应用比较  

Comparison of Low-Energy X-RAY Thickness Measuring Device and β-RAY Thickness Measuring Device Applied to Film Manufacture

作　　者：刘伟[1] 

机构地区：[1]安徽铜峰电子股份有限公司,安徽铜陵244000

出　　处：《电力电容器》2001年第3期36-38,共3页Power Capacitors

摘　　要：分析比较了低能量 X- RAY和β- RAY两种测厚仪在薄膜生产测量中的差别。指出低能量 X- RAY测厚仪将逐渐替代 β- RAY测厚仪 ,成为今后薄膜厚度测量的主流机型。Difference between low energy X RAY thickness measuring device and β RAY thickness measuring device used in film manufacture is analysed. It is pointed out that the low energy X RAY device will gradually replace the β RAY one , and become an essential model for film thickness measurement in years to come.

关 键 词：薄膜生产 低能量X-RAY测厚仪 β-RAY测厚仪 应用 

分 类 号：TP274[自动化与计算机技术—检测技术与自动化装置]