石英谐振式力传感器  

QUARTZ RESONATOR FORCE TRANSDUCER

作　　者：王设希[1] 

机构地区：[1]中国空气动力研究与发展中心

出　　处：《气动实验与测量控制》1991年第1期78-82,共5页

摘　　要：本文介绍了一种新型的具有频率输出的测力传感器——石英谐振式测力传感器的设计、结构、工艺及安裝调试中的有关问题。该传感器采用频率控制中被广泛使用的AT 切型石英谐振器为力敏感元件。当被测力作用在谐振器的边缘上时,会使谐振频率随着力值的大小发生线性偏移,选择力方位角约40°,以减小温度对传感器灵敏度的影响;为了减小传感器的零点温漂,设计了具有双片谐振器的差动式传感器,即选用两片频率温度特性一致的石英谐振器,其中一片用来感受被测力,另一片只感受温度,用作温度补偿。为了减小电路引线对传感器输出的影响,采用了将振荡电路安装在传感器壳体内的结构形式。文中还给田了传感器的实验数据。In this paper,the development of a new type of quartzcrystal resonator transducer is described.In the transducer,an AT-Cutquartz crystal resonator mostly used in frequency control is used as the basicforce sensing element.Force measured is applied to the edge of the res-onator,thus its resonating frequency changes linearly with the appliedforce.The force direction is arranged to an angle which is approximate-ly 40°to the x-axis in crystal to decrease the temperature effect onthe transducer sensitvity.To improve thermal zero shift.two quartzcrystal resonator matched in temperature effect are used,one used forsensing force,and the other for temperature only.In order to decreasethe effect of oscillator curcuit on the output of transducer,the oscilla-tor curcuit is set in the case of transducer.And also,the testing dataare given in this paper.

关 键 词：力传感器 石英晶体 谐振传感器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]