PSD-LD在两平面平行度测量中的应用  

Application of PSD-LD to measuring parallelism between Two Planes

作　　者：高经伍[1] 赵凤华[1] 张茂川[1] 李静[1] 王建国[1] 

机构地区：[1]东北电力学院自控系基础部,吉林吉林132012

出　　处：《矿山机械》2001年第9期39-40,共2页Mining & Processing Equipment

摘　　要：介绍日本８０年代的新产品ＰＳＤ“光位敏器”，以及ＬＤ“半导体激光器”，对ＰＳＤ和ＬＤ的工作原理行了分析，讨论了由ＰＳＤ－ＬＤ组成的“光一位置传感器”测量水平度的可行性，并对由ＰＳＤ－ＬＤ组成的“光一位置传感器”在其它领域的应用作了有意义的探讨。The paper introduces 1980' new products PSD (Position Sensitive Detector) and LD (semiconductor Laser Detector ) made in Japan, analyzes the working principle of them, discusses the practicability measuring the horizontality by use of the optics-position sensor composed of PSD and LD (PSD-LD. The paper also makes an approach to application of PSD- LD to other similar fields.

关 键 词：平面 平行度测量 数据处理 光-位置传感器 PSD-LD测量系统 

分 类 号：P226[天文地球—大地测量学与测量工程]