移相式数字波面干涉仪中的几个技术问题  

Technical Problems in Digital Phase-stepping Flatness Interferometers

作　　者：于瀛洁[1] 韦春龙[1] 陈明仪[1] 

机构地区：[1]上海大学精密机械工程系,上海200072

出　　处：《光学精密工程》2001年第6期584-587,共4页Optics and Precision Engineering

基　　金：上海市教委青年基金项目

摘　　要：光学件波面测量在光学加工业中有着大量的需求 ,近年来相关测量技术发展非常迅速 ,其中移相技术是较典型的代表 ,发展日趋成熟并得到了广泛应用。以PG 15型平面干涉仪为硬件基础 ,采用移相技术 ,解决了其中移相值标定、相位解调、误差处理中的难点 ,研制了数字波面干涉仪。对干涉仪中的这几个关键技术问题进行了讨论 。Flatness measurement of optical workpieces in optical manufacturing is very important. In recent years, the relative techniques have developed rapidly, expecially phase stepping technique, which has become mature gradually and has been applied widely. The paper utilizes the flatness interferometer, mode PG 15, as a basic hardware to design a digital flatness phase stepping interferometer. In the course of designing, a few of key difficulties had been overcome, including phase step calibration, phase unwrapping and error processing. The paper discusses these key techniques and presents their solving methods in detail.

关 键 词：波面干涉仪 移相值标定 相位解调 误差处理 

分 类 号：TH744.3[机械工程—光学工程]