MOS力敏运算放大器  

Stress-Sensitive MOS Operational amplifier

作　　者：岳瑞峰[1] 刘理天[1] 李志坚[1] 

机构地区：[1]清华大学微电子学研究所,北京100084

出　　处：《电子学报》2001年第8期1032-1034,共3页Acta Electronica Sinica

摘　　要：利用MOSFET的压阻效应 ,本文提出了力敏运算放大器的概念、基本原理和设计思想 .作为其应用之一 ,研制出一种新型集成压力传感器———集成MOS力敏运放压力传感器 .这种压力传感器具有很高的压力响应灵敏度 。The concept, fundamental and design methodology of stress-sensitive operational amplifier are proposed on the basis of piezoresistive effect of MOS field-effect transistor. As one of its applications, a novel integrated pressure sensor with stress-sensitive MOS operational amplifier is designed and fabricated. This kind of pressure sensor is of very high pressure sensitivity and promising to achieve widespread application in many fields.

关 键 词：力敏运算放大器 集成压力传感器 MOS 

分 类 号：TN722.77[电子电信—电路与系统]