MgAl_2O_4透明陶瓷电子辐照及退火效应  

Effects of Electron Irradiation and Annealing on Transparent MgAl_2O_4 Ceramics

作　　者：何捷[1] 林理彬[1] 王鹏[1] 卢勇[1] 邹萍[2] 

机构地区：[1]四川大学物理学系,四川成都610064 [2]四川大学分析测试中心,四川成都610064

出　　处：《微电子学》2001年第4期279-281,291,共4页Microelectronics

摘　　要：用能量 1 .7Me V,束流强度 0 .7μA· cm-2 ,总注量 6 .3× 1 0 16 cm-2的电子辐照镁铝尖晶石透明陶瓷 ,并对辐照后的样品进行等时退火。利用 PAT、UV- VIS和 FI- IR测试 ,表明辐照前3 3 6 0 cm-1处有吸收峰 ,通过电子辐照样品在 2 3 7nm和 3 70 nm处产生吸收带 ,3 3 6 0 cm-1处吸收峰消失 ,主要是由 VOH-1心及辐照产生的 F心和 V型色心引起的。通过退火 ,可消除 F心及 V型色心吸收峰。Transparent MgAl 2O 4 ceramics were exposed to an electron beam with energy of 1 7 MeV and fluency of 6 3×10 16 cm -2 , and the irradiated samples have been annealed isochronally.A study has been made on optical properties and defects of the sample by means of UV VIS, FT IR and PAT.Results indicate that before irradiation there is an absorb peak at 3360 cm -1 , which die off after irradiation.Electrons irradiated MgAl 2O 4 ceramics introduces tow optical absorption bands at 237 nm and 370 nm which are due to V type absorption and F center.All the color centers can be destroyed by annealing process.

关 键 词：镁铝尖晶石透明陶瓷 电子辐照 等时退火 色心 

分 类 号：TM28[一般工业技术—材料科学与工程]