外差干涉仪中金属反射镜对测量精度的影响  

Influence of Metal Mirror to Measurement Accuracy in Heterodyne Interferometer

作　　者：赵慧洁[1] 

机构地区：[1]北京航空航天大学,北京100083

出　　处：《仪器仪表学报》2001年第6期602-605,共4页Chinese Journal of Scientific Instrument

基　　金：航空基础科学基金 (96I51 1 1 5);国防科技预研基金 (98J1 8.3.3HK0 1 1 9)资助项目

摘　　要：根据金属反射理论 ,偏振光经金属反射镜反射后会变成椭圆偏振光。本文研究了共光路干涉仪中偏振方向相互垂直的线偏振光通过金属反射镜后引起的椭圆偏振光的不正交性和偏心度 ,并研究了此偏振光经渥拉斯顿棱镜后引起的频率混叠误差的机理和变化规律。经矢量分析得到 ,该误差是一阶非线性误差 ,呈正弦规律变化 ,误差的最大值随安装方位误差的增大而增大。本文给出了具体的计算实例和误差补偿措施 ,对实现外差干涉仪的高精度测量是极为重要的。According to the reflection theory of metal,polarized light can be changed into elliptic polarized light through the reflection of metal mirror.This paper analyzed the non-orthogonality and unequal eccentricity of elliptic polarized beams that are caused by two orthogonal polarized beams through the reflection of metal mirror.The principle of the frequency mixing error that is caused by the elliptic polarized beams passing through Wollaston prism is studied.It is concluded by vector theory that the measurement error is first-order non-linear error which is changed according to sinusoidal law and its maximum value becomes greater when the orientation error(θ)increases.Also,the example and the error compensation methods are given.It is of great importance in high precision measurement with heterodyne interferometer.

关 键 词：外差干涉 金属反射镜 测量精度 

分 类 号：TH744.3[机械工程—光学工程]