工艺参数对碳纳米管定向薄膜生长的影响  

Influence of process parameters on the growth of well-aligned carbon nanotube films

作　　者：吴功伟[1] 曹安源[1] 魏秉庆[1] 徐才录[1] 梁吉[1] 吴德海[1] 

机构地区：[1]清华大学机械工程系

出　　处：《清华大学学报（自然科学版）》2002年第2期151-153,共3页Journal of Tsinghua University(Science and Technology)

基　　金：教育部博士学科重点科研基金项目 ( 0 12 9948)

摘　　要：为了生长出高质量的定向碳纳米管薄膜 ,研究了反应时间、反应温度等工艺参数对薄膜生长的影响。试验采用二甲苯为碳源 ,二茂铁为催化剂 ,在石英基底上催化裂解生长碳纳米管定向薄膜。通过扫描电子显微镜 (SEM)和透射电子显微镜 (TEM)观察表明 ,得到的薄膜是由定向性良好的多壁碳纳米管 (MWNTs)组成 ,管径为 2 0～ 5 0 nm。反应时间对定向生长的碳纳米管长度有决定性影响 ;随反应时间的增长 ,定向性更好。同时 ,较适合碳纳米管薄膜定向生长的反应温度区间为 10 5 3～ 1113K。而反应温度和反应时间对薄膜中碳纳米管的直径无明显影响。The influence of process parameters, such as reaction time and temperature, on the growth of high quality well aligned carbon nanotube films was investigated. In the experiments, Xylene was used as the carbon source with ferrocene as the catalyst precursor to grow well aligned carbon nanotube films on quartz substrates. The scanning electron microscope (SEM) and transmission electron microscope (TEM) images indicated that the as grown film consists of well aligned multi walled carbon nanotubes (MWNTs) with diameters of 20 ～ 50 nm. The reaction time significantly influenced the length of the well aligned carbon nanotubes and the alignment improved with increasing reaction time. A suitable reaction temperature for growth was 1053～1113K. There is no significant relation between the reaction time or temperature and the diameter of the carbon nanotubes in the films.

关 键 词：碳纳米管 定向生长 工艺参数 碳纳米管薄膜 石英基底 反应温度 反应时间 

分 类 号：TB383[一般工业技术—材料科学与工程]