钇钡铜氧半导体薄膜的宽光谱响应特性  

Broad Spectral Response Characteristics of Semiconducting YBCO Thin Film

作　　者：万春明[1] 刘向东 孙强[1] 李艳红[1] 刘景和[1] 李建立[1] 李国栋[2] 黄宗坦[2] 黄承彩[2] 李丹[2] 黄江平[2] 

机构地区：[1]长春光学精密机械学院,长春130022 [2]昆明物理所,昆明650023

出　　处：《Journal of Semiconductors》2001年第11期1387-1391,共5页半导体学报（英文版）

基　　金：中国兵器工业总公司资助项目~~

摘　　要：对以 Si为衬底的钇钡铜氧 (分子式 :Y1 Ba2 Cu3O7-δ　δ≥ 0 .5 ,简称 :YBCO)半导体薄膜的宽光谱响应特性进行了研究 .采用该薄膜作灵敏元的单元测辐射热计分别对红外波段 (1— 15μm)、亚毫米波段 (5个波长 )及毫米波 (3m m )进行光谱响应测试 ,结果表明这种半导体探测器不仅在红外波段 ,而且在亚毫米波甚至毫米波段都有良好的响应特性 .该薄膜是继 VO2The broad spectral response characteristics of semiconductor Y 1Ba 2Cu 3O 7 δ (abb.:YBCO, δ ≥0.5)thin film on silicon substrate is studied.The spectral responses in infrared waveband(1-15μm),submillimeter waveband(5 wavelengths) and millimeter waveband(3mm) are tested by using a single sensing element Bolometer with YBCO thin film.The results show that the semiconductor detector has fine spectral response characteristic not only in infrared waveband but also in submillimeter waveband and in millimeter waveband.This thin film is a kind of new material used on noncryogenic infrared focal plane instead of VO 2 thin film.

关 键 词：钇钡铜氧半导体薄膜 测辐射热计 宽光谱响应 

分 类 号：TN304.9[电子电信—物理电子学]