新型原子力显微镜的研制及其应用  

A NEW TYPE OF ATOMIC FORCE MICROSCOPE AND ITS APPLICATIONS

作　　者：张冬仙[1] 章海军[1] 李博[1] 黄峰[1] 

机构地区：[1]浙江大学现代光学仪器国家重点实验室,杭州310027

出　　处：《光子学报》2002年第1期50-54,共5页Acta Photonica Sinica

摘　　要：研制了一种新型卧式原子力显微镜 ( AFM)系统 .本文介绍卧式 AFM的工作原理及其简要结构 ,讨论反馈控制电路系统的优化设计 ,阐述 Windows/ Dos兼容的图象扫描、处理和显示软件 .基于原子力曲线的测定 ,利用 AFM对纳米金刚石薄膜和多孔氧化铝进行了扫描检测 .实验表明 ,该 AFM系统具有十分良好的图象重复性、稳定性和衬比 (度 ) ,仪器的横向分辨率优于 3 nm,纵向分辨率可达 1 nm,最大扫描范围达到 5μm× 5μm.A new type of horizontal atomic force microscope (AFM) is developed for applications in nanotechnology.This article provides the basic principle and setup of the horizontal AFM.The optimized feedback control system and the Windows/Dos compatible software system for image scanning and processing are also introduced.Based on the measurement of atomic force curves,images of diamond thin film and porous alumina were successfully scanned by using the AFM.Experiments show that the horizontal AFM is of high repeatability,reliable stability and ideal contrast for image acquisition.The horizontal and vertical resolutions of the system are 3nm and 1nm,respectively,with a maximum scan range of 5μm×5μm.These remarkable characteristics enable the AFM system to be widely applied in the fields of nanotechnology.

关 键 词：原子力显微镜 纳米技术 研制 AFM 工作原理 结构 

分 类 号：TH742.9[机械工程—光学工程] TB383[机械工程—仪器科学与技术]