氢气氛下电子辐照对氧化铝特性的影响  

Effects of Electron Irradiation on Aluminum Oxide in Hydrogen Atmosphere

作　　者：张海涛[1] 孔令柱[1] 张强基[1] 杨本福[2] 罗顺忠[2] 赵国珍[3] 张奇峰[3] 

机构地区：[1]复旦大学材料科学系,上海200433 [2]中国工程物理研究院,绵阳621900 [3]机械工业部上海材料研究所,上海200437

出　　处：《真空科学与技术》2001年第5期398-400,共3页Vacuum Science and Technology

基　　金：中国工程物理研究院科学技术基金资助项目 (990 5 0 2 2 9)

摘　　要：处在H2 气氛围下的氧化铝陶瓷受电子辐照时表面电导率会发生变化 ,这在某些应用中是非常重要的。本文采用X射线光电子谱仪对阳极氧化法制备的氧化铝薄膜 (厚度 6 0nm)作了模拟研究。结果表明 ,原制备的样品存在有氧化铝和氢氧化铝 2种化学状态 ,然而 ,经H2 气氛围下荷能电子 (5keV)辐照后 ,部分氢氧化铝态转变为氧化铝态。同时 ,样品表面的C污染将降低约 1个数量级。经上述处理后 。The changes,for example in electrical conductivity,of aluminum oxide ceramic under electron irradiation in hydrogen atmosphere are important in some cases.In this work,the chemical states of the aluminum oxide prepared by anodizing process with thickness of 60 nm has been investigated with X ray photoelectron spectroscopy(XPS).The results show that there are two kinds of states,aluminum oxide and aluminum hydroxide in the original sample as prepared,and the aluminum hydroxide component turns partially into the aluminum oxide state under the energetic electron(5 keV)irradiation in the hydrogen environment.Also the carbon contamination on the sample surface will be greatly reduced by one order of magnitude.We conclude that the insulativity will not be degraded during the treatment mentioned above.

关 键 词：氧化铝 阳极氧化 电子辐照 氢氛围 化学态变化 陶瓷材料 绝缘性能 

分 类 号：TQ174.1[化学工程—陶瓷工业]