溅射—阳极氧化法在釉面砖上制备多彩TiO_2膜  

Preparation of multi-colored TiO_2 films on the ceramic substrate by sputtering-anodic oxidation method

作　　者：朱月秀[1] 胡云展 

机构地区：[1]温州大学信息科学与工程学院,浙江温州325027 [2]温州市表面处理技术研究所,浙江温州325005

出　　处：《真空》2001年第6期26-28,共3页Vacuum

摘　　要：采用直流磁控溅射法先在釉面砖上镀制一层 Ti膜 ,然后采用阳极氧化法制备透明的 Ti O2 薄膜。根据光的干涉原理 ,控制 Ti O2 膜的厚度 ,制备了土黄、深兰、浅兰、金黄、粉红、紫红。Ti film has been grown on the ceramic substrates by DC magnetron sputtering, then the transparent TiO 2 film has been grown on it by anodic oxidation. Based on the principle of photo interference, more than ten colors of metalized decorative ceramics, such as yellowish brown, dark blue, light blue, golden, pink, purple, green, etc, have been made by the method to control the thickness of the TiO 2 films.

关 键 词：磁控溅射 TIO2薄膜 阳极氧化 釉面砖 二氧化钛膜 表面金属化 表面镀 钛膜 成色原理 

分 类 号：TQ174.764[化学工程—陶瓷工业] TQ153.3[化学工程—硅酸盐工业]