制冷机低温泵的故障及排除  

Trouble of refrigerator cryopump and its elimination

作　　者：任卫祥[1] 任家生[1] 

机构地区：[1]东南大学,江苏南京210096

出　　处：《真空》2001年第6期45-49,共5页Vacuum

摘　　要：制冷机低温泵的冷源是小型制冷机。制冷机在日常运行中可能发生种种故障 ,对制冷机的制冷能力和制冷温度都有明显的影响 ,亦对泵的抽气特性产生影响。本文着重讨论制冷机在日常运行中可能发生的种种故障。The condensation source of the modern cryopump is a mini refrigerator. The cryopump may have some kinds of troubles when it does circulations daily, and these troubles may give obvious effects to the ability of the refrigerator and the temperature of the refrigerator. These troubles will also effect to the air extracting character of the pump. This article mainly discusses what kinds of troubles may occur when the refrigerator circulates daily, the reason of these troubles and how to eliminate the troubles.

关 键 词：制冷机 低温泵 故障 排除方法 原因分析 维修 结构 工作原理 

分 类 号：TB651[一般工业技术—制冷工程] TB752.53