相移干涉技术在小角度及直线度测量中的应用  

Application of Phase Shift Interferometry to the Measurement of Small Angle and Linearity

作　　者：王权陡[1] 余景池[1] 张忠玉 张学军[1] 

机构地区：[1]中国科学院长春光机所应用光学国家重点实验室,长春130022

出　　处：《计量学报》2002年第1期6-9,共4页Acta Metrologica Sinica

摘　　要：应用相移干涉及Zernike多项式波面拟合技术实现对空间小角度的高精度测量 ,测量精度可达到 0 0 13″。与采用自准直仪、激光干涉小角度测量仪的测量方法相比较 ,测量精度有较大幅度的提高。与测长设备 光栅尺结合使用 。The small angle measurement accuracy can be 0 013″ by a novel technology of phase shift interferometry and Zernike polynomial to fit wavefront. The measurement accuracy can be improved largely compared with the typical angle measurement,such as using self collimator and laser interferometer for angle measurement . Moreover, with application of length measurement device (linear encoder), the linearity of pitch and roll for the guide way can be measured with a high accuracy at the same time.

关 键 词：相移干涉 ZERNIKE多项式 直线度测量 小角度测量 波面拟合 相移激光干涉 测量原理 导轨 

分 类 号：TB92[一般工业技术—计量学] TH74[机械工程—测试计量技术及仪器]