钛合金氧化膜的AES和XPS研究  

Study of Oxide Scale on Ti base Alloys by XPS and In situ AES Techniques

作　　者：封向东[1] 祖小涛[1] 王治国[1] 林理彬[1] 李燕伶[2] 黄新泉[2] 

机构地区：[1]四川大学辐射物理及技术教育部重点实验室,四川大学物理系,成都610064 [2]中国核动力研究设计院,成都610041

出　　处：《核动力工程》2001年第6期501-503,共3页Nuclear Power Engineering

基　　金：四川大学辐射物理及技术教育部重点实验室开放课题资助项目

摘　　要：用X射线衍射仪(XRD)、X射线电子谱仪(XPS)和原位俄歇电子谱(AES)法研究了Ti-Al-V合金在300℃pH9的水中氧化13000h所形成的氧化膜的结构、成分和价态以及其随深度的变化。发现氧化膜是由TiO2、Al2TiO5、Ti3O5、Ti2O3和TiO所组成,并且,氧化膜由表面到基体基本是按以上顺序交迭构成。通过XPS和原位AES分析发现钛合金表面形成稳定的厚约500nm的Ti4+(TiO2)层,随深度的增加出现了Ti3+(Ti3O5、Ti2O3)和Ti2+(TiO),直至基体,氧化膜总厚度约3000nm。The oxide scale on Ti-base alloys in pH9 water at 300°C was investigated by X-Ray Diffraction (XRD), X-Ray Photoelectron Spectrometry (XPS) and in-situ Auger Electron Spectroscopy (AES) techniques. The XPS result showed that the chemical state of titanium changed with the depth: Ti4+ appeared near the surface of the oxide scale. As the depth increased, Ti3+(Ti2O3) and Ti2+(TiO) appeared. At first the percentages of Ti3+ was more than Ti2+, then there was more Ti2+ than Ti3+ when the depth was increased. The XRD spectroscopy and In-situ AES technique showed that the oxide scale formed on Ti-base alloys was composed of Al2TiO5, TiO2, Ti3O5,Ti2O3, Al2O3 and TiO. The depth profiles obtained by AES showed that the flat part appeared at the first part of the profile near the surface, and revealed that a stable layer of brookite (TiO2) was formed. The compact thick 5000A scale with the mixture of brookite-TiO2 and Al2TiO5 was formed near the surface, and the total thickness of oxide scale was about 30000A.

关 键 词：钛合金氧化膜 原位AES XPS 分析 结构 XRD 

分 类 号：O484.5[理学—固体物理]