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作 者:谢致薇[1] 王国庆[1] 蒙继龙[2] 谢光荣[1] 胡社军[1]
机构地区:[1]广东工业大学,广东广州510643 [2]华南理工大学,广东广州510640
出 处:《稀有金属材料与工程》2002年第1期56-59,共4页Rare Metal Materials and Engineering
摘 要:对 Fe+Cr改性多元氮化物薄膜 ,即 (Ti Fe Cr) N多元膜的高温氧化行为进行了研究 ,结果表明 :(1)这种多元膜在 6 0 0℃以上温度下的氧化增重均低于 Ti N膜 ,加热至 6 0 0℃膜层仍保持良好的光泽 ,加热至 80 0℃膜层仍保持完整 ,没有类似 Ti N膜的局部脱落现象 ,说明这种多元膜具有优于 Ti N的抗高温氧化性能 ;(2 ) 6 0 0℃氧化 1h后 ,X射线衍射 (XRD)谱上没有出现类似于 Ti N场合下出现的氧化铜的谱线 ,说明这种多元膜可以有效地抑制铜基体的氧化 ,具有优于 TiThe high temperature oxidation behavior of (Fe+Cr) modified multi component films has been investigated. The mass gain of the multi component films during the entire experimental temperature region was lower than that of TiN film. No change in the smooth finish of the films occurred after treatment at 600℃, for 1 h, and there was no local peeling similar to TiN films after treatment at 800℃, for 1 h, which showed that the presence of Fe and Cr could improve significantly the resistance to oxidation. There was no copper oxide in the sample with the multi component films after treatment of 600℃, for 1 h, while there appeared some copper oxide in th sample with TiN films, which showed that the multi component films can protect the substrate from oxidation.
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