Y60A单晶炉的热场设计及测试  

Designing and Testing the Heat Field of Y60A Crystal Growing Furnace

作　　者：梁秀梅[1] 张冰毅[1] 

机构地区：[1]西安理工大学,陕西西安710048

出　　处：《电子工业专用设备》2001年第2期21-26,共6页Equipment for Electronic Products Manufacturing

摘　　要：结合LBO、BBO等氧化物晶体生长的工艺条件 ,在一台包含三温区的晶体生长炉中进行热场控制的实验研究 ,实验结果表明该炉室恒温区内控温精度≤± 0 2℃ ;炉温均匀度≤± 1℃。In this paper,experimental research into heat field control in a crystal formation furnace with three-temperature zones in conducted in combination with the technological conditions of LBO?BBO oxide crystal formation and the results of experimental showed that the accuracy of temperature control in the constant zone ≤±0 2℃and the eveness of temperature control in the constant zone ≤±1℃.

关 键 词：热场设计 三温区 控温精度 炉温均匀度 晶体炉 Y60A型 测试 晶体生长 

分 类 号：TF806.9[冶金工程—有色金属冶金]