微腔型传感器的电化学表征及其应用初探  

Electrochemical Characterization of Chamber-type Microchip and its Preliminary Application

作　　者：贾能勤[1] 朱燕[1] 章宗穰[1] 

机构地区：[1]上海师范大学生命与环境科学学院,上海200234

出　　处：《上海师范大学学报（自然科学版）》2002年第1期47-50,共4页Journal of Shanghai Normal University(Natural Sciences)

基　　金：上海市教委发展基金资助项目 CL970 9

摘　　要：利用微机械加工技术、各向异性腐蚀技术研制了具有三维结构的微腔型传感器 ,微芯片 3× 6mm2 具有三维腔体 腔深 3 0 0μm,铂工作电极 1 .2 1 .2 mm2 ,Ag/ Ag Cl参比 ,工作电极与 Ag/ Ag Cl参比集成在同一微芯片上 .作者对微腔型电极进行了电化学特性的表征 ,并测试了微芯片上 Ag/ Ag Cl参比电极的性能 ,考察了微腔型传感器在化学传感器、生物传感器方面的初步应用 ,对 H2 O2 。A microchip with three dimensional silicon chamber (1.2×1.2mm 2 and 300μm thick) was developed for the construction of micro size sensor by micromachining technology and anisotropic etching. The electrochemical characterization of its Pt working electrode was investigated and the performance of its Ag/AgCl reference elecrode was evaluated. The preliminary application in the detection of H 2O 2 and galactose was also reported.

关 键 词：微腔型传感器 微机械加工技术 化学传感器 生物传感器 电化学表征 应用 各向异性腐蚀技术 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]