光滑曲面的硅微透镜列阵形成机理研究  

Studies on the Formation Mechanism of SiliconMicromirror Array with Smooth Curved SurfaceManufactured by Micromechanical Process

作　　者：朱维安[1] 池凌飞[1] 

机构地区：[1]汕头大学物理学系,汕头515063

出　　处：《汕头大学学报（自然科学版）》2002年第1期27-31,共5页Journal of Shantou University：Natural Science Edition

摘　　要：采用碱性腐蚀的典型微机械加工法 ,制备出了光滑曲面的硅微透镜列阵 ,对试验样品进行了轮廓曲线测试 ,计算出了该腐蚀工艺的快腐蚀面 .重点研究了微透镜列阵凹面的形成机理 ,提出了与试验测试结果相吻合的解释模型 .该模型对微光学透镜的设计加工具有重要指导意义 .The typical micromechanical process by means of alkaline etching was adopted to manufacture silicon micromirror array with smooth curved surface,and profilographic tests were conducted on samples to calculate the rapid etched surfaces formed in the process.Investigations were made into the formation mechanism of the true concave surfaces to form an interpretative model which is in good agreement with the experimental results and which is of great significance for the design and manufacture of microoptical lens.

关 键 词：硅微光学透镜 台阶测试 硅碱性腐蚀 形成机理 光滑曲面 微光学器件 硅微机械 

分 类 号：O435.2[机械工程—光学工程] TH－39[理学—光学]