SnO_2膜导电玻璃性能的研究  

Study on Property of Conductive Glass with SnO_2 Film

作　　者：朱月秀[1] 王德苗[2] 

机构地区：[1]温州大学信息科学与工程学院,浙江温州325027 [2]浙江大学信电系,浙江杭州310027

出　　处：《材料科学与工程》2002年第1期72-74,共3页Materials Science and Engineering

摘　　要：采用喷镀法制备SnO2 膜导电玻璃 ,研究了膜厚、基底温度对薄膜电阻和透光率的影响。用SEM、XPS和XRD分析了SnO2 膜的形貌与导电性能 ,并研究了其透光性、反射性及热稳定性。结果表明 :SnO2 膜是多晶结构氧空位导电的N型半导体 ,在可见光范围内透光率达We have obtained the transparent and conductive glass with SnO 2 film by spray method. The effect on the sheet resistance and the transmittance by the film thickness and the substrate temperature were studied. The SnO 2 film apperarance, conductive properties wre investigated by using SEM、XPS and XRD. The transmittance rate, the reflectance rate and the hot stability were analyzed. The results showed that the SnO 2 film is the multi crystal constructive N type semi conductor whose carrier is oxygen hole, the transmittance is greater than 88% and the hot stability is far better than other films.

关 键 词：SnO2膜 谱图分析 透光率 热稳定性 导电玻璃 喷镀法 二氧化锡膜 

分 类 号：O484.4[理学—固体物理]