集成电路测试系统MSA方法探索  

MSA Research of Integrated Circuits Measurement System

作　　者：涂继云[1] 傅铮翔 何燕青 Tu Ji-yun;Fu Zheng-xiang;He Yan-qing(China Electronic Technology Group Corporation NO.58 Research Institute,Jiangsu Wuxi 214035)

机构地区：[1]中国电子科技集团公司第五十八研究所,江苏无锡214035

出　　处：《电子质量》2018年第12期128-131,共4页Electronics Quality

摘　　要：集成电路的测试过程是对产品功能、参数评估的重要环节,测试质量直接影响到对产品质量的判断。而测试质量又与测试系统本身的"五性"密切相关,所以要求对测试系统本身进行分析判定,即必须做MSA。但由于MSA的"五性"分析方法相对复杂,以及集成电路测试系统情况也相对比较复杂和特殊,如果完全照搬资料文献上的MSA方法用于集成电路测试系统分析,会给实际工作带来很多麻烦,而且各种文献资料关于"五性"分析的顺序说法不一。该文从实际工作出发,阐述了"五性"分析的基本概念,分析了集成电路测试系统MSA工作遇到的困难和困惑,给出了对集成电路的测试系统如何合理进行MSA的方法探索。The testing process of integrated circuits is an important part of product function and parameter evaluation.The quality of testing directly affects the judgment of product quality.Whereas,quality of the test is closely related to the "five characterizations" of the test system itself,so it is required to analyze and judge the test system itself,that is,it must do MSA.However,due to the relatively complicated "five characterizations" analysis method of MSA and the relatively complicated and special situation of integrated circuit test system,if the MSA method in the literature is completely copied for the analysis of integrated circuit test system,it will bring a lot of practical work.Trouble,and the various documents have different opinions on the order of the "five characterizations" analysis.Starting from the actual work,this paper expounds the basic concepts of "five characterizations" analysis,analyzes the difficulties and confusions encountered in the work of integrated circuit test system MSA,and gives a method for how to properly conduct MSA on the test system of integrated circuits.

关 键 词：MSA GRR(重复性、再现性) 偏倚 线性 稳定性 校正球 

分 类 号：TN407[电子电信—微电子学与固体电子学]