电流体动力学近场直写工艺参数对微图案的影响  

Effects of the Electrohydrodynamic Near-Field Direct-Writing Process Parameters on Micro Patterns

作　　者：李鹏 吴婷[1] 张礼兵[1] 陈建洲 冯孝为 黄风立[1] 左春柽[1] Li Peng;Wu Ting;Zhang Libing;Chen Jianzhou;Feng Xiaowei;Huang Fengli;Zuo Chuncheng(College of Mechanical and Electrical Engineering,Jaxing University,Jiaxing 314001,China)

机构地区：[1]嘉兴学院机电工程学院

出　　处：《微纳电子技术》2019年第1期65-70,共6页Micronanoelectronic Technology

基　　金：国家自然科学基金项目面上资助项目(51775242);浙江省基础公益研究计划资助项目(LGG18E050016);2018年度浙江省大学生科技创新活动计划暨新苗人才计划资助项目(2018R417036);2018年度嘉兴学院大学生科研训练计划(SRT)项目重点B类项目(SRT2018B009)

摘　　要：以聚氧化乙烯(PEO)为直写溶液,光泽柔性绝缘相纸作为基板材料,采用自主研制的电流体动力学近场直写(ENDW)设备直写微图案。研究了工作电压、直写高度和直写溶液的质量分数等参数对PEO溶液的直写微图案宽度的影响。结果表明在使用质量分数3%的PEO溶液在进行直写时,喷嘴与基底之间的工作电压从1.1kV增大到2.6 kV,PEO微图案的平均宽度从35.61μm下降到23.3μm,并且图案宽度的工艺误差从8.24μm下降到2.21μm。随着工作电压的增大,喷嘴处的射流形态变化依次为:液滴状、弯液面、稳定射流、多股射流。同时研究发现,通过降低直写高度和增加PEO溶液的质量分数,能进一步减小微图案的宽度,并且能够提高微图案宽度的均匀性。With the polyethylene oxide(PEO)as the direct-writing solution and glossy flexible insulating photopaper as the substrate material,the micro patterns were directly written by the self-developed electrohydrodynamic near-field direct-writing(ENDW)setup.The effects of the working voltage,direct-writing height and mass fraction of the direct-writing solution on the width of direct-writing micro patterns with the PEO solution were studied.The results show that using the PEO direct-writing solution with a mass fraction of 3%,the working voltage between the nozzle and substrate increases from1.1 kV to 2.6 kV,the average width of the PEO micro patterns decreases from35.61μm to 23.3μm,and the fabrication error of the micro pattern width decreases from8.24μm to 2.21μm.With the increase of the working voltage,the jetting behavior of the nozzle changes in order of the droplet,curved surface,stable jet and multiple jets.At the same time,the study result shows that by reducing the direct-writing height and increasing the mass fraction of the PEO solution,the width of the micro patterns can be further reduced,and the uniformity of the micro pattern width is improved.

关 键 词：电流体动力学 近场直写 微图案 聚氧化乙烯(PEO) 柔性绝缘基板 

分 类 号：TP605[自动化与计算机技术—控制理论与控制工程]