基于SIFT图像拼接算法的标准样板测量技术  

Measurement Technology of the Standard Template Based on the SIFT Image Stitching Algorithm

作　　者：程纪榕 赵军[1] 蔡潇雨[2] 邵力[2] Cheng Jirong;Zhao Jun;Cai Xiaoyu;Shao Li(China Jiliang University,Hangzhou 310018,China;Shanghai Institute of Measurement and Testing Technology,Shanghai 201203,China)

机构地区：[1]中国计量大学,杭州310018 [2]上海市计量测试技术研究院,上海201203

出　　处：《微纳电子技术》2019年第1期71-77,共7页Micronanoelectronic Technology

基　　金：国家重大科学仪器设备开发专项资助项目(2014YQ090709)

摘　　要：为了在使用高倍物镜测量标准样板时获得高分辨率的样本整体区域信息,提出了一种基于尺度不变特征变换(SIFT)图像拼接算法的标准样板测量技术。首先通过高倍物镜获取局部三维结构,将其转化为二维灰度图像;然后采用SIFT和RANSAC算法得到准确的特征点;最后采用加权平均融合算法得到完整图像,重构整体样板三维结构,并利用ISO5436-1∶2000对标准样板台阶高度进行评价。实验对100和400 nm两种高度的标准样板进行了测量和拼接,并对拼接后的台阶高度进行评价,测量均值分别为100.3和398.9 nm,实验表明该技术能准确还原标准样板中台阶的高度,有效扩大了标准样板形貌重构的范围。In order to obtain the overall region information of the high-resolution sample by using high-magnification objective lens to measure the standard template,the standard template measurement technology based on the scale-invariant feature transform(SIFT)image stitching algorithm was presented.Firstly,the local three-dimensional structure was obtained by the highmagnification objective and was transformed into the two-dimensional gray image.Then the SIFT and RANSAC algorithm were used to obtain accurate feature points.Finally,the weighted average fusion algorithm was used to obtain the complete image,and the overall template threedimensional structure was reconstructed.The step height of the standard template was evaluated using the ISO5436-1∶2000.The standard templates with the step heights of 100 nm and400 nm were measured and stitched,and the step heights after stitching were evaluated.The average values were 100.3 nm and 398.9 nm,respectively.The experiments show that the technology can accurately restore the step height in the standard template,and has effectively expanded the scope of standard template morphology reconstruction.

关 键 词：微纳米测量 图像拼接 标准样板 台阶高度标准 形貌重构 

分 类 号：TP391[自动化与计算机技术—计算机应用技术]