基于模态局部化效应的微机械加速度计研究进展  

Research Progress of A Novel MEMS Accelerometer Based on Mode Localization

作　　者：康昊 常洪龙[1] KANG Hao;CHANG Hong-long(Northwestern Polytechnical University,Xi'an 710072)

机构地区：[1]西北工业大学,西安710072

出　　处：《导航与控制》2018年第6期16-22,93,共8页Navigation and Control

基　　金：国家自然科学基金(编号:51575454)

摘　　要：模态局部化效应是安德森局部化在结构动力学中的一种具体表现形式,其利用振动模态的能量局部集中效应实现了灵敏度的大幅度提高。因此,模态局部化效应近年来逐渐被用于研制高精度的谐振式传感器。介绍了模态局部化效应的基本原理及发展历程,及其在各类谐振式传感器中的应用及研究现状,包括质量传感器、电荷传感器、位移传感器以及刚度传感器。最后,着重介绍了模态局部化效应在惯性敏感器件加速度计中的应用及研究现状。Modal localization is a concrete expression of Anderson localization in structural dynamics. The sensitivity is improved greatly due to the localization of energy in the vibration mode, which also pushes the mode localization to be applied in high-sensitivity resonant sensors in recent years. This paper briefly introduces the principle and development history of mode-localized sensing and the applications in various resonant sensors such as mass sensors, charge sensors, displacement sensors and stiffness sensors. Finally, the applications of mode localization in accelerometer are introduced.

关 键 词：模态局部化 弱耦合谐振器 谐振式传感器 加速度计 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]