多探针扫描探针显微镜研究进展与应用  

Progress and development in multiple-probe scanning probe microscopes

作　　者：许可[1] 邵永健 李鹏 裘晓辉[2] Ke Xu;Yongjian Shao;Peng Lie;Xiaohui Qiu(School oflnformation &Control Engineering,Shenyang Jianzhu University,Shenyang 110168,China;Chinese Academy of Sciences (CAS)Key Laboratory of Standardization and Measurement for Nanotechnology,CAS Center for Excellence in Nanoscience,National Center for Nanoscience and Technology,Beijing 100190,China)

机构地区：[1]沈阳建筑大学信息与控制工程学院,沈阳110168 [2]国家纳米科学中心,中国科学院纳米科学卓越创新中心,中国科学院纳米标准与检测重点实验室,北京100190

出　　处：《科学通报》2018年第35期3713-3726,共14页Chinese Science Bulletin

基　　金：国家自然科学基金(61604048,61327813);辽宁省自然科学基金重点项目(20170540748)资助.

摘　　要：扫描探针显微镜(SPM)是微纳尺度形貌表征、物性测量及微纳操作的重要工具之一.传统的SPM只有单一探针,功能单一,多探针扫描探针显微镜(MP-SPM)的出现拓展了SPM的应用.MP-SPM的多个探针可充当精确定位的测量电极,从而提供了一种无损探测样品微纳尺度电学输运性质的方法;也可相当于多只独立活动的"手",相互配合实现复杂的纳米操作;还可以探针成像,成像信息作为其他探针操作的先验/反馈信息,从而提高操作的效率及准确性.本文首先介绍了MP-SPM的基本仪器结构,多探针距离缩小及位置标定方法,以及使用多探针技术测量材料电阻率的原理,接着总结了近年来MP-SPM在样品微纳尺度电学输运性质测量、微纳操作、并行成像与操作以及新型力学性质测量等方面的应用,最后探讨了该技术的前沿发展以及面临的机遇与挑战.Scanning probe microscopes (SPM)is one of the important tools for micro/nano-scale morphological characterization, physical property measurement and micro/nano operation.However,the traditional SPM has only a single probe and its function is limited.The emergence of multiple-probe scanning probe microscopes (MP-SPM)greatly expands the application of SPM. Characterizing the electrical transport properties of materials is very important for materials and microelectronics,because it can effectively guide synthetization of high-quality materials and fabrication of high-performance devices.Traditionally,directly measuring the conductivity of nanomaterials is performed using the nanofabricated electrodes connected to the nanomaterial of interest and the monolithic micro-four-point probes.However,photoresist and organic solvents may be left on the surface of the nanomaterial during nanofabrication,which will affect the intrinsic measurement of electrical transport properties.As for the monolithic micro-four-point probes,probe spacing is quite large due to the limitation of the manufacturing process and it will not change any more once they have been manufactured,which limits its flexibility.MP-SPM's multiple probes can act as measuring electrodes with precise localization,and the probe-sample distance can be controlled precisely,providing a means of flexible and non-destructive detection of micro/nanoscale electrical transport properties of samples. Micro/nano-manipulation systems help to manufacture microelectronic and photonic devices,renewable energy apparatus and biomedical diagnosis chip,etc.Typical micro/nano-manipulation systems are established based on optical tweezer,magnetic tweezer,scanning electron microscopy (SEM)and SPM.However,they all have limitations.Optical tweezer may damage the sample due to the continuously irradiated lasers.Magnetic tweezer has a poor ability to control the object quantificationally,and low resolution.The system based on SEM is restricted to a vacuum working environment.On the surf

关 键 词：多探针 扫描探针显微镜 电学输运性质测量 微纳操作 并行成像与操作 

分 类 号：TH742[机械工程—光学工程]