基于针孔阵列型的单次曝光双波长叠层成像  

Pinhole-array-based single-shot ptychography with dual-wavelenghth

作　　者：罗勇 许文慧 史祎诗 LU0 Yong;XU Wenhui;SHI Yishi(School of Optoeleetronics,University of Chinese Academy of Sciences,Beijing 100049,China;Academy of Opto-Eleetronics,Chinese Academy of Sciences,Beijing 100094,China)

机构地区：[1]中国科学院大学光电学院,北京100049 [2]中国科学院光电研究院,北京100094

出　　处：《中国科学院大学学报（中英文）》2019年第1期31-37,共7页Journal of University of Chinese Academy of Sciences

基　　金：国家自然科学基金(61575197);中国科学院"科教结合"教育创新项目(KJ20108036)资助

摘　　要：传统的叠层成像技术在增加参与成像的波长数量时,可有效地提高系统的成像质量和抗噪声能力。该技术已广泛应用于成像及测量等领域。但其复杂的机械移动式曝光方式,导致系统存在抖动、数据采集效率低且精度较差等问题,在增加成像波长数量时更严重地影响系统成像和测量性能。采用针孔阵列型双波长单次曝光叠层成像技术,经过实际的光学实验和数值模拟论证,在双波长情况下实现对实验数据的高效和高精度采集,避免了传统多波长叠层成像技术的弊端。还指出并论证,在选择参与成像的激光波长时,有必要考虑两个重要的波长参数:中心波长和波长间隔,为多波长的叠层成像技术提供有效的指导依据。与传统的双波长、多波长叠层成像技术相比,基于针孔阵列型的双波长单次曝光叠层成像技术具有更高的效率和更广泛的应用领域。The traditional ptychographic imaging engine effectively improves the imaging quality and anti-noise ability of the system when the number of wavelengths involved in imaging increases, and it has been widely used in the fields of imaging and measurement. However, the complicated mechanical moving exposure method leads to jittering of the system, data acquisition inefficiency, and poor accuracy, and increase in the number of imaging wavelengths even more seriously affects the system imaging and measurement performance. In this work, the pinhole-array dual-wavelength single-shot ptychographic imaging is used. Actual optical experiments and numerical simulation demonstrate that the experimental data can be collected efficiently with double wavelength and high precision, and the drawbacks of traditional multiwavelength stack imaging are avoided. We also point out and demonstrat that, in choosing the laser wavelength involved in imaging, it is necessary to consider two important wavelength parameters, center wavelength and wavelength interval, which provides effective guidance for multiwavelength multilayer imaging technology. The pinhole-array-based single-shot ptychographic imaging with dual-wavelength has higher efficiency and a wider range of applications, compared with the traditional dual wavelength and multiwavelength ptychographic imaging engines.

关 键 词：针孔阵列 单次曝光 叠层成像(PIE) 波长参数 

分 类 号：O439[机械工程—光学工程]