三坐标测量机在RFQ加速器腔体测量中的应用  

Application of tri-coordinate measuring in the of RFQ accelerator cavity

作　　者：葛辉 陈文军[1] 马贞 Ge Hui;Chen Wenjun;Ma Zhen(Institute of Modern Physics,Chinese Academy of Sciences,Lanzhou 730000,China)

机构地区：[1]中国科学院近代物理研究所,兰州730000

出　　处：《国外电子测量技术》2018年第12期26-30,共5页Foreign Electronic Measurement Technology

摘　　要：Radio frequency quadrupole(RFQ)的生产制造精度和测量的准确性是RFQ腔体能否成功出束的关键之一,传统几何尺寸及形位公差的测量通常使用游标卡尺、深度游标尺、千分尺等常规器具,难以实现空间内较为复杂元素的高精度测量,而三坐标测量机能够实现空间复杂元素的高精度测量。通过对三坐标测量机的工作原理的研究、选择最佳的装夹方式、建立特定的工件坐标系,通过设计要求选取测量元素、编制测量程序、CNC测量、输出测量数据等方法的应用,使得RFQ腔体测量精度控制在0.01 mm以内,通过分析与评价得出各项测量结果均符合设计要求。Radio frequency quadrupolec(RFQ), the manufacturing precision and measuring accuracy is one of the keys to the success of the beam of RFQ accelerator cavity. We usual use vernier calipers, vernier depth gauge and micrometer and so on to measure the traditional geometric size and geometric tolerance. But it is difficult to achieve precision measurement about more complex elements in space. However, tri-coordinate measuring can realize it. We select the clamping method, establish the coordinate system of workpiece with the study of the working principle of the tri-coordinate measuring. We could select the measurement elements according to the requirements of design, program composition of measurement, take the CNC measurement and output measurement data through the tri-coordinate measuring. And we accomplish the aim that accuracy of measurement of RFQ cavity is controlled within 0.01 mm. It comes to a conclusion that the measurement results meet the design requirements by analysis and evaluation.

关 键 词：测量 三坐标测量机 RFQ 误差 

分 类 号：TB22[天文地球—大地测量学与测量工程]