X切LiNbO_3脊形结构集成电光M-Z型调制器  

Integrated Electrooptic M-Z Modulator with Ridge Structure in X-cut LiNbO_3

作　　者：陈福深[1] 李其聪[1] 

机构地区：[1]电子科技大学光纤通信国家重点实验室,四川成都610054

出　　处：《中国激光》2002年第3期209-212,共4页Chinese Journal of Lasers

摘　　要：采用X切LiNbO3 基片 ,设计并研制了脊形结构集成电光Mach Zehnder(M Z)波导调制器 ,实验研制过程包含关键的LiNbO3 基片湿腐蚀刻槽技术和大厚度电极制作技术。研究结果表明 ,脊形结构调制器与传统的平面结构调制器相比 ,在大幅度提高调制带宽方面 。An integrated electrooptic Mach-Zehnder modulator with ridge structure has been designed and fabricated by using X-cut LiNbO3 substrate. The key techniques of LiNbO3 wet etching and large thick electrode fabricating are contributed to form the ridge structure for the modulator. Experimental results show that the ridge-type optical modulator has much more obvious advantages in increasing the modulation bandwidth compared with a conventional modulator with planar structure.

关 键 词：脊形结构 电光调制器 X切LiNbO3 M-Z型干涉仪 

分 类 号：TN761[电子电信—电路与系统]