软X射线多层膜反射镜界面粗糙度的一种估算方法  

A Method of Evaluating the Roughness of a Co/C Multi-layer Film

作　　者：宋利民[1] 胡家升[1] 

机构地区：[1]大连理工大学电子与信息工程学院,辽宁大连116024

出　　处：《中国激光》2002年第3期236-238,共3页Chinese Journal of Lasers

摘　　要：介绍了描述单个非理想粗糙界面散射的D .G .Stearns法 ,它适用于软X射线短波段区域。将这种方法应用到多层膜结构 ,并采用它的数学模型来描述软X射线短波段区域 (1～ 10nm)多层膜界面粗糙度。在此理论下 ,对波长为 4.77nm的Co/C多层膜反射镜界面粗糙度进行了分析 ,估算出该多层镜界面间均方根粗糙度为 0 7nm。Stearns' scattering method is introduced in this paper, which describes the scattering of a single non-ideal interface and is applicable for soft X-ray short wavelength region. It is then extended to multi-layer structure and uses a mathematical modal from Stearns' method to describing the multi-layer interface roughness at soft X-ray short wavelength region (1～10nm). Under the framework of this theory, the interface roughness of a Co/C multi-layer mirror with the wavelength of 4.77 nm is analyzed. The root-mean-square roughness of the multi-layer interface of the mirror is 0.7 nm.

关 键 词：界面粗糙度 反射率 反射镜 软X射线 多层膜 估算方法 

分 类 号：O484.5[理学—固体物理]