大功率激光光束聚焦光斑功率密度分布直接测量仪的研究  

Research on High Power Laser Beam and Focus Power Intensity Distribution Directly Measuring Instrument

作　　者：李强[1] 雷訇[1] 黄民双[1] 于振声 王智勇[1] 左铁钏[1] 

机构地区：[1]北京工业大学国家产学研激光技术中心,北京100022

出　　处：《中国激光》2002年第3期257-262,共6页Chinese Journal of Lasers

基　　金：国防科工委重点预研资助项目

摘　　要：针对激光加工大功率激光功率密度分布测量的要求 ,采用空心探针扫描采样测量法 ,提出并建立了被测激光经探针小孔、探针内通道传输的数学物理模型 ,经计算 ,给出了包括探针微孔孔径、探针内通道尺寸、系统采样点数等系统参数 ,设计了新的测量系统 ,实现了对大功率激光光束、聚焦光斑功率密度分布的直接测量 ,测量结果与理论计算相吻合。测量仪能对CO2 激光和YAG激光进行直接测量 ,测量的功率大于 10kW ,功率密度大于 10 7W /cm2 ,测量激光光束的最大直径为 6 0mm ,激光聚焦光斑的直径小于 0 5mm。Using the method of rotating needle pinhole, the measuring system which can directly measure the high-dense laser transverse intensity distribution of laser beams/focus for laser processing is developed. The mathematical and physical models of measured laser beams/focus propagation in needle pinhole are established. According to the calculation, the system parameters, including aperture of needle pinhole, dimension of propagation channel, dot number of sampling, are given. A new measuring system is designed. The measuring of high power laser beams/focus by this system is realized. The calculation results are of agreement with the measuring results. The instrument can measure CO2 and YAG laser, measured power larger than 10 kW, maximal measured power density up to 107 W/cm2, measured laser beam maximal diameter is 60 mm, measured laser focus minimal diameter smaller than 0.5 mm.

关 键 词：大功率激光 功率密度分布 直接测量 光束聚焦光斑 

分 类 号：TN247[电子电信—物理电子学]